| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus, for the inspection of a defect, in which a quality can be decided with reference to a precision pattern which is hardly detected optically such as a pattern which is created by a transparent metal film conductor, the inner-layer pattern of a multilayer printed-wiring board or the like. SOLUTION: A DC potential is applied to one end of a conductive pattern. A detecting electrode is made to face the other end of the conductive pattern. A change in a capacitance which is formed across the detecting electrode and the conductive pattern is detected electrically. Thereby, the conductive pattern is inspected.
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