COMPOSITE PIEZOELECTRIC VIBRATING PLATE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a composite piezoelectric vibrating plate that is excellent in adhesion to electrodes even when it is configured with a soft composite piezoelectric body and has an electromechanical coupling coefficient equivalent to that of a conventional plate. SOLUTION: In the composite piezoelectric vibrating plate consisting of a composite piezoelectric body comprising a piezoelectric ceramics and a high polymer member and of electrodes formed to an upper face and a lower face of the piezoelectric body, the electrodes are made up of a gold layer or a copper layer made of electroless plating. In the composite piezoelectric vibrating plate consisting of the composite piezoelectric body comprising the piezoelectric ceramics and the high polymer member and of electrodes formed to the upper face and the lower face of the composite piezoelectric body, at least one electrode is made of a nickel layer formed on the face of the piezoelectric ceramics by electroless plating and a gold layer or a copper layer formed on the nickel layer directly or via a nickel - chromium layer and made of a gold layer or a copper layer formed on a face of the high polymer member or a gold layer or a copper layer formed on the face of the high polymer member via a nickel - chromium layer.