| 摘要 |
PROBLEM TO BE SOLVED: To increase the number of individual structures or inspecting components that can inspect a chip surface of an integrated circuit. SOLUTION: The inspecting components are a plurality of transistors. At least two transistors are placed between two adjacent contact surfaces and are connected to the adjacent contact surfaces. Thus, voltage can be applied to the transistors via the contact surfaces, and gate terminals of the transistors are connected to another contact surface to supply switching current.
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