ELECTRON BEAM IRRADIATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electron beam irradiation device that can scan an electron beam uniformly by avoiding problems of the hysteresis properties of a scanning coil when the electron beam is scanned reciprocally in the longitudinal direction. SOLUTION: The electron beam irradiation device which scans the electron beam in the first direction by using a power source generating a triangular wave to supply a triangular-wave current to the scanning coil and does so in the direction orthogonal to the first direction by using a power source generating a square wave to supply a square-wave current to a deflection coil is equipped with a controlling device that deforms the waveform of the triangular wave supplied from the power source generating it so as to cancel the effect of the hysteresis properties of the scanning coil.