发明名称 PATTERN-FORMING METHOD OF THIN FILM
摘要 PROBLEM TO BE SOLVED: To reduce the manufacturing costs. SOLUTION: A cover 2 having a window 2a is provided on a base 1, and the surface of the base 1 is surface-treated by corona discharge 3. The cover 2 is formed by an organic film, plastic, glass, or metal that can be easily machined, and has a shape that is not easily changed by the corona discharge 3.
申请公布号 JP2001298021(A) 申请公布日期 2001.10.26
申请号 JP20000115126 申请日期 2000.04.17
申请人 NIPPON TELEGR & TELEPH CORP <NTT> 发明人 SATO NORIO;MACHIDA KATSUYUKI;KURAKI OKU
分类号 B05D3/06;B05D5/06;B05D7/04;H01L21/316;(IPC1-7):H01L21/316 主分类号 B05D3/06
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