发明名称 Cutting apparatus equipped with a blade aligning means
摘要 Disclosed is a cutting apparatus equipped with a means for alignment of its rotary blade relative to a selected street on a semiconductor wafer. The cutting apparatus has a marking member positioned at such a place that the rotary blade can make a mark of cutting position in an indexing direction on the marking member, thereby permitting the rotary blade to be put in precise alignment relative to a selected cutting line on the semiconductor wafer by adjusting the rotary blade in the direction traversing the street-cutting direction until the trace of the rotary blade has been put in alignment with a reference hairline.
申请公布号 US2001032533(A1) 申请公布日期 2001.10.25
申请号 US20010836240 申请日期 2001.04.18
申请人 SEKIYA KAZUMA 发明人 SEKIYA KAZUMA
分类号 B23D59/00;H01L21/00;H01L21/301;H01L21/68;(IPC1-7):B26D7/02 主分类号 B23D59/00
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