Measuring profile deviations of an virtually flat reflecting surface involves determining profile deviation from position and measurement values obtained from interferometric separation measurement

摘要

The profile deviation of a reflecting surface (11) is determined by comparing the reflecting surface with a known normal surface (9), such that the reflecting and normal surfaces are parallelly arranged. Interferometric separation measurement is then performed by mechanical grid scanning. Profile deviation is determined from the position and measurement values. An Independent claim is also included for the profile deviation measuring device.