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发明名称
BESCHICHTUNGSVERFAHREN UND VORRICHTUNG
摘要
申请公布号
DE59801545(D1)
申请公布日期
2001.10.25
申请号
DE19985001545
申请日期
1998.10.21
申请人
SIEMENS AG
发明人
BEELE, WOLFRAM
分类号
C23C4/00;C23C14/04;(IPC1-7):C23C14/04
主分类号
C23C4/00
代理机构
代理人
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地址
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