| 发明名称 |
Tool used for processing wafers has a thermally sprayed coating on its surface |
| 摘要 |
Processing tool has a thermally sprayed coating on its surface. Preferred Features: The coating is an oxide, ceramic, plastic, boride and/or carbide. The coating contains group III or IV metals. The coating is especially Al2O3 and/or TiO2.
|
| 申请公布号 |
DE10064012(A1) |
申请公布日期 |
2001.10.25 |
| 申请号 |
DE20001064012 |
申请日期 |
2000.12.21 |
| 申请人 |
LINDE GAS AG |
发明人 |
HEINRICH, PETER;RICHTER, PETER |
| 分类号 |
B28D5/00;C30B33/00;(IPC1-7):H01L21/68 |
主分类号 |
B28D5/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
