MICRO-MIRROR DEVICE FOR IMAGE DISPLAY PANEL

摘要

PURPOSE: A micro-mirror device for image display panel is provided to change a progressing path of an incident ray by improving a geometrical structure of a horizontal support beam. CONSTITUTION: A couple of the first post(20) is projected from an upper face of a substrate(10). An electrode(15) is formed on the substrate(10). A hinge point is supported by the first post couple(20). The second post(40) is projected from a support beam(30). A mirror(50) is used for reflecting incident rays. The mirror(50) is supported by the second post(40). A tilt angle of the mirror(50) can be controlled by the electrodes(15) and electrostatic attraction therebetween. The electrode(15) is formed with a base electrode(11) and a connection electrode(13). The support beam(30) has a horizontal support beam(31) for supporting the second post(40) and a couple of spring(33) for connecting the first post couple(20) with both ends of the horizontal support beam(31).