| 摘要 |
<p>A miniature gyroscope (micro-gyro) (10) used for detection of angular velocity. The micro-gyro (10) disclosed is a 'Z-axis gyro' that measures the rate of angular rotation about a rate axis perpendicular (Z-axis) to the plane of the device. Z-axis gyros can be mounted flat on a horizontal surface, and measure the rotational rate of an object turning about a vertical axis. The micro-gyro uses multiple elements configured in a single-layer planar structure. The elements include two input elements (70a, 70b) and an output element (80). The two input elements (70a, 70b) are driven into oscillation in opposite directions to provide a balanced momentum. In response to a rotational rate, the input elements (70a, 70b) create Coriolis forces which are detected and amplified by the output element (80). The input elements (70a, 70b) are separate from the output element (80) to eliminate the coupling problem associated with prior single mass structures. The multi-element design enables active suppression of imbalance, and permits the optimization of inertial gain that enhances micro-gyro performance.</p> |
