| 发明名称 |
SYSTEM FOR INSPECTING THE SURFACES OF OBJECTS |
| 摘要 |
The invention relates to an inspection system for optically examining the surfaces of objects to detect surface errors. The system scans image strips and, consequently, a given surface rapidly and with sufficient resolution using a linescan camera and an upstream microscope by aligning the captured lines. |
| 申请公布号 |
WO0179822(A1) |
申请公布日期 |
2001.10.25 |
| 申请号 |
WO2001DE01442 |
申请日期 |
2001.04.12 |
| 申请人 |
SIEMENS AKTIENGESELLSCHAFT;GERHARD, DETLEF;LECHNER, JOHANNES |
发明人 |
GERHARD, DETLEF;LECHNER, JOHANNES |
| 分类号 |
G01N21/89 |
主分类号 |
G01N21/89 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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