Interferometric measuring device for rough object surface measurement has coherent light beam split into 2 partial beams with optical probe inserted in path of object beam

摘要

The measuring device uses a coherent light beam fed to a beam splitter (ST1) for providing partial beams (T1,T2) directed onto the object surface and a reflective reference surface, with interference between the reflected partial beams, to provide an interference pattern detected via an image converter (BS). An optical probe (OSO) is inserted in the object light path, for producing ay least one intermediate image.