MODULAR SUBSTRATE MEASUREMENT SYSTEM

摘要

Substrate measurement system including a measurement chamber (30), and a substrate handling chamber (7) possessing substrate transfer means (10) and a substrate container interface (1) arranged to receive a substrate container (8), the handling chamber (7) containing a first interface (50) to connect the measurement chamber (30), the measurement chamber (30) containing a second interface (51) to connect to the handling chamber (7), and the transfer means (10) being arranged to transfer substrates between the container (8) and the measurement chamber (30) through the handling chamber (7), in which system a second measurement chamber (39) is provided, having the same second interface (51) as the first measurement chamber (30) to replace the latter chamber (30).