APPARATUS AND METHOD FOR ELECTROCHEMICAL PROCESSING OF SUBSTRATES

摘要

In a method for electrochemical processing of a substrate (S), use is made of an apparatus which comprises a container (1) having a chamber for holding an electrolyte, an electrode member (8) arranged in the chamber, and a substrate holder (60) arranged in the chamber and adapted to carry the substrate (S). A voltage source is connected to the electrode member (8) and the substrate holder (60) to establish, during processing, an electrical field in the electrolyte between the electrode member (8) and the substrate (S) carried by the substrate holder (60). The apparatus also comprises a turbulence generator (12) with a stirring portion which is rotatable in the chamber between the electrode member (8) and the substrate holder (60), to achieve an optional degree of turbulence between the electrode member (8) and the substrate (S), independently of a possible flow of electrolyte through the chamber, and to minimise concentration gradients in the electrolyte.