Heater for high vacuum optical view port,申请号EP19990403322-传众专利搜索

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发明名称	Heater for high vacuum optical view port
摘要
申请公布号	EP1037506(A3)	申请公布日期	2001.10.24
申请号	EP19990403322	申请日期	1999.12.30
申请人	BOARD OF REGENTS, THE UNIVERSITY OF TEXAS	发明人	MATTORD, TERRY J.;GILBERT, MICHAEL H.
分类号	H01L21/203;C23C16/52;H01L21/66;H05B3/14;H05B3/84;(IPC1-7):H05B3/14;B01J3/00;B32B18/00;C23C14/52;C23C16/34;H01L21/00	主分类号	H01L21/203
代理机构		代理人
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