METHOD AND APPARATUS FOR EVALUATING INSULATION FILM

摘要

PURPOSE: A method and apparatus for evaluating an insulating film is provided to ensure, even if the insulating film such as a gate insulating film has been reduced in thickness, the detection of the time at which the insulating film breaks down by causing a measuring terminal for evaluating the insulating film for the characteristics or thickness thereof to function as the gate electrode of an MIS structure. CONSTITUTION: A measuring member having a plurality of conductor bumps and wires connected to the conductor bumps are disposed above the substrate while placing the conductor bumps and the insulating film in opposing relation. The conductor bumps is contacted with the insulating film and the conductor bumps and the insulating film are pressed against each other with a given pressing force. An electric stress is applied between the conductor bumps and the conductor layer to evaluate the insulating film for the characteristics or dimensions thereof.