A process for distributing ultra high purity gases with minimized corrosion

摘要

A process for reducing corrosion in a gas distribution network of ultra high purity gas or any part of said distribution network, comprising: (a) Wet cleaning the gas distribution network or at least one part thereof with a wet cleaning agent, (b) Liquid drying said gas distribution network or said at least one part thereof with an H2O desorbing liquid drying agent selected from the group consisting of acetone dimethylacetal DMP, 2.2 dichloropropane DCP or 2.2 dibromopropane DBP, mixtures thereof and any equivalent thereof, (c) purging said gas distribution network or any said part thereof with a dry high purity gas comprising less than 1 ppm of any impurity, and (d) evacuating said gas distribution network or any said part thereof at a pressure which is lower than 5x10<4> Pascal (e) exposing said gas distribution network or said any part thereof to an atmosphere comprising an ultra high purity corrosive gas or air.