Power control apparatus for an ion source having an indirectly heated cathode,申请号GB19970014990-传众专利搜索

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发明名称	Power control apparatus for an ion source having an indirectly heated cathode
摘要
申请公布号	GB2327513(B)	申请公布日期	2001.10.24
申请号	GB19970014990	申请日期	1997.07.16
申请人	* APPLIED MATERIALS INC	发明人	STEPHEN * WELLS
分类号	H01J27/08;H01J37/08;H01J37/248;(IPC1-7):G05F1/02;H01J27/02;H01J37/24	主分类号	H01J27/08
代理机构		代理人
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