发明名称 |
Support device for a wafer shipping container |
摘要 |
<p>A support device for a wafer shipping container, to constrain the flexure of a multiple number of backgrind-processed wafers when the wafers are stored in alignment in the wafer shipping container. For this support device, stoppers are projected inwards from the front and rear sides of a container body as a part of the wafer shipping container. The support device is comprised of: a pair of opposing walls, which are positioned on the bottom side of the container body and inserted into, and fixed by, the stoppers; a pair of connecting bars across the spacing between the paired opposing walls; a multiple number of partitioning supporters arranged with a predetermined pitch in the longitudinal direction of the paired connecting bars. The wafers are inserted and held between adjoining partitioning supporters, whereby they are prevented from flexing.</p> |
申请公布号 |
EP1148536(A2) |
申请公布日期 |
2001.10.24 |
申请号 |
EP20010109260 |
申请日期 |
2001.04.14 |
申请人 |
SHIN-ETSU POLYMER CO., LTD. |
发明人 |
YAJIMA, TOSHITSUGU;FUNAMI, HIROYUKI |
分类号 |
B65D25/10;H01L21/673;B65D85/86;(IPC1-7):H01L21/00 |
主分类号 |
B65D25/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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