METHOD FOR MANUFACTURING SURFACE ACOUSTIC WAVE DEVICE

摘要

PURPOSE: To provide a manufacturing method by which the short-circuit of an electrode hardly occurs and a piezoelectric substrate in the electrode forming area of a surface acoustic wave element formed later is hardly deteriorated for constituting the plural surface acoustic wave elements constituted on the same piezoelectric substrate by using electrodes different in thickness. CONSTITUTION: In the manufacturing method of a surface acoustic wave device, IDT electrodes 1a and wiring electrodes 1b for short-circuiting the interdigital electrodes of the IDT electrodes are formed on a piezoelectric substrate 3 by dry etching. An area where the electrode structure of a second surface acoustic wave filter element 2 is formed is protected by a conductive film 2b during a dry etching process and a second resist 6 is given after the IDT electrodes 1a and the wiring electrodes 1b are formed. The resist is heated and the IDT electrodes 2a of the second acoustic surface wave filter element 2 are formed. Then, the short-circuiting wiring electrodes 1b are cut.