| 摘要 |
PROBLEM TO BE SOLVED: To provide a black aluminum nitride sintered compact maintaining intrinsic characteristics of the aluminum nitride, such as high thermal conductivity or high resistance to plasma and a method of producing the same. SOLUTION: The black aluminum nitride sintered compact is composed of aluminum nitride and yttrium aluminate and has a lightness index L*, defined by JIS Z 8729-1994, of <45. The black aluminum nitride sintered compact is obtained by adding >=0.1 and <=10 wt.%, expressed in terms of outer percentage and yttrium element, based on aluminum nitride, of a yttrium compound to an aluminum nitride powder, then forming and sintering at 1450 to 1900 deg.C under a reduced pressure atmosphere of <=10 Torr for at least 1 hr. |
