METHOD OF FORMING METAL OXIDE THIN FILM

摘要

PROBLEM TO BE SOLVED: To simply and efficiently obtain a transparent metal oxide thin film low in cloudiness. SOLUTION: In the formation of the metal oxide thin film by a liquid deposition method, a substrate is cleaned (S1) at first, a dispersion of aluminum oxide is applied on the surface (S2) and dried at 80-300 deg.C (S3). The coating film of a metal oxide is formed on the aluminum oxide coating film (S4).