| 摘要 |
PURPOSE: An apparatus and a method for transferring a glass substrate are provided to detect a damage of a glass substrate by installing a sensor between rollers. CONSTITUTION: A mega sonic device(2) performs an ultrasonic cleaning process after performing a rubbing process. A spin device(4) removes a cleaning solution from a glass substrate(12). A shutter(6) and a multitude of roller(8) are installed between the mega sonic device(2) and the spin device(4). A robot(10) is located at one side of an end of a conveyer. The first and the second magnetic sensors(14,16) are formed parallel to a direction perpendicular to a transfer direction of the glass substrate(12) between the rollers(8). The glass substrate(12) is cleaned by using a high frequency of the mega sonic device(2) after the rubbing process for the glass substrate(12) is performed. The first and the second sensors(14,16) sense a damage of the glass substrate(12).
|
