发明名称 DISCHARGE HEAD OF PLASMA TREATMENT APPARATUS, METHOD FOR ARRANGING THE SAME AND METHOD FOR PLASMA TREATMENT OF WORK HAVING WIDE REGION TO BE TREATED
摘要 PROBLEM TO BE SOLVED: To provide the discharge heads, which are equipped with a pair of electrodes, of a plasma treatment apparatus, capable of preventing the generation of undesirable discharge between the adhacent discharge heads when a plurality of the discharge heads are juxtaposed. SOLUTION: Electrode assemblies 41 are attached to a head case main body 13 so as to be put aside to one end side in the longitudinal direction of the almost rectangular front 13a of the main body. When a work having a wide region to be surface-treated is treated, a plurality of electrode units 5 are jaxtaposed so that the electrode assemblies 41 become alternate with each other.
申请公布号 JP2001293362(A) 申请公布日期 2001.10.23
申请号 JP20000114345 申请日期 2000.04.14
申请人 KEYENCE CORP 发明人 FUJITA TSUKASA
分类号 H05H1/24;B01J19/08;C23F4/00;H01J37/32 主分类号 H05H1/24
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