| 摘要 |
PURPOSE: A structure of a mass slit of an ion implantation system is provided to prevent particles inserted into a bearing by installing a mass slit cover on the bearing. CONSTITUTION: A couple of mass slit cover(30,31) is installed on upper portions of a left upper bearing(12) and a right upper bearing(13). The mass slit covers(30,31) are fixed to the shafts(12,13) by a screw inserted into a screw hole(33) so that the mass slit covers(30,31) are rotated with the shafts(12,13). The mass slit covers(30,31) is used for preventing particles inserted into the left upper bearing(12) and the right upper bearing(13). The life time of the left upper bearing(12) and the right upper bearing(13) is lengthened by the mass slit covers(30,31). In addition, a left rotary feed thru(20) and a right rotary feed thru(21) are protected by the mass slit covers(30,31).
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