| 摘要 |
According to the present invention, a liquid supply unit which comprises a supplying line (34) detachably connected with a liquid supply port of a storage container (22), a force-feeding line (40) detachably connected with a force-feeding gas intake port of said storage container, a bypath line (66) for communicating said supplying line and said force-feeding line with each other, a purge gas supply means (46, 48) for supplying a purge gas to said supplying line, and a vacuum evacuation means for vacuum-evacuating the inside of said supplying line, is characterized in that said vacuum evacuation means is made to have a vacuum container (94) constructed such that its inside is depressurized to a predetermined degree of vacuum, and connected with said force-feeding line. In this construction, the vacuum evacuation in the lines can be carried out for a short period of time and stably by use of the vacuum container while a vacuum evacuation apparatus such as a vacuum pump is not directly connected with the lines. |
