发明名称 METHOD OF GROWING GALLIUM NITRIDE-BASED COMPOUND SEMICONDUCTOR CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a method of growing a high quality gallium nitride-based compound semiconductor crystal suitable as a blue light-emitting material. SOLUTION: In the method of growing the gallium nitride-based compound semiconductor crystal on a single crystal substrate, M1(1-x)M2xY (M1 and M2 are each a different metal element; Y is one or more selected from carbon, nitrogen, boron or oxygen; and x is >0 and <1), having a rock salt structure, preferably having (111) face, especially preferably having lattice spacings of (111) faces of M1Y and M2Y such that the lattice spacing of one of the (111) faces of M1Y and M2Y is larger than the lattice spacing of (0001) face of the gallium nitride-based compound semiconductor and the other lattice spacing is smaller than that of the gallium nitride-based compound semiconductor, that is to say, they show reverse signs to each other in lattice mismatching ratio, is used as the single crystal substrate mentioned above.
申请公布号 JP2001294500(A) 申请公布日期 2001.10.23
申请号 JP20000090656 申请日期 2000.03.29
申请人 JAPAN ENERGY CORP 发明人 YAEGASHI SEIJI
分类号 C30B29/38;H01L21/205;H01L33/12;H01L33/16;H01L33/32 主分类号 C30B29/38
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