| 摘要 |
PROBLEM TO BE SOLVED: To provide a purified water making device solving the problem of pyrogen. SOLUTION: This purified water making device makes purified water filtered and purified with a reverse osmosis module 1 provided with a reverse osmosis membrane. A front stage of a booster pump 15 for feeding water to the reverse osmosis module 1 is connected to a delivery pipe line 30 of the purified water purified with the reverse osmosis module 1 through a circulation path 33 provided with a back pressure valve 35, and as the booster pump 15, a pump is used of variable transfer quantity type changing the transfer quantity in accordance with pressure of the purified water in the delivery pipe line 30. This pump directly feeds the purified water without storing it in a feed tank, and the variation of the use quantity of the purified water is coped with by circulation of the purified water and also changing the transfer quantity of the booster pump 15.
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