| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating device in which the coating quantity and the coating thickness is precisely controlled and the exchange or the cleaning of a coating liquid is easily performed and which is free from the futile use of the coating liquid. SOLUTION: The coating device is provided with a coating nozzle 20 having a liquid vessel 2 housing a coating liquid and a slit member 1 in which a slit 9 is formed, a piston member driving structure 3 for inserting a piston member 6 into the liquid vessel 2, a replenishing tank 5 connected to the liquid vessel 2 through a valve 4 and an excitation structure 10 for applying vibration to the liquid tank 2. The coating liquid to be filled into the liquid vessel 2 from the replenishing tank 5 is discharged from the slit 9 by a prescribed quantity by inserting the piston member 6 into the liquid vessel 2.
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