发明名称 Fabrication method for an electrically erasable programmable read only memory
摘要 A method is used to fabricate an electrically erasable programmable read only memory. First, a substrate is provided. Then, a doped polysilicon pillar is formed on the substrate. Furthermore, a source is formed in the substrate beneath the doped polysilicon pillar. Finally, the other structures of the memory are completed in sequence.
申请公布号 US6306708(B1) 申请公布日期 2001.10.23
申请号 US20000496892 申请日期 2000.02.02
申请人 UNITED MICROELECTRONICS CORP. 发明人 PENG NAI-CHEN
分类号 H01L21/28;H01L21/8247;(IPC1-7):H01L21/824 主分类号 H01L21/28
代理机构 代理人
主权项
地址