发明名称 Variable height sensor tree
摘要 A variable position sensing device is provided. The device includes a fixed track attached to a track holder. An adjustable sensor holder is adapted to receive a sensor and is capable of sliding and locking into position on the fixed track. The sensor device has particular applicability and the semiconductor manufacturing industry for setting sensors at different positions in a liquid chemical holding vessel.
申请公布号 US6305235(B1) 申请公布日期 2001.10.23
申请号 US19980168607 申请日期 1998.10.09
申请人 AIR LIQUIDE AMERICA CORPORATION 发明人 GEURIAN JOHN D.;COOPER DAVID G.;HONG XUONG P.
分类号 G01F23/00;G01F23/26;H01L21/027;(IPC1-7):G01D21/00 主分类号 G01F23/00
代理机构 代理人
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