Process for evacuating a wet gas a treatment device to carry out this process and a suction pump for a treatment device of this type

摘要

A process for evacuating a wet or liquid conveying medium out of the treatment chamber (2) of a treatment device (1) using a pumping device (3) that has a single or multi-stage suction pump (4) is provided, where the conveying medium is cooled off during the evacuation along the flow path such that the conveying medium in the pumping device (3) is in the liquid aggregate state or is converted into that state. A treatment device for carrying out the process as well as a single or multi-stage suction pump for this treatment device is also provided. In order to prevent a re-vaporization of the condensate or condensate film remaining in the suction pump (4), it is provided in the process and associated treatment device (1) that the cooling of the conveying medium is done at least in the area of at least one pump head (7) of the suction pump (4) and/or one connection channel connecting subsequent pump stages of the multi-stage suction pump to each other, and that at least one pump head (7) and/or the connection channel is cooled off below the vaporization temperature or boiling temperature present at the given evacuation pressure.