ION IMPLANTATION EQUIPMENT FOR PREVENTING OVERHEATING

摘要

PURPOSE: A manufacturing method is provided to improve abrasion resistance of the surface by colliding ions having a higher energy onto an existing product in a high speed, thereby infiltrating ions into the surface of the product in a depth of about thousands Å, and enable alleviation of heat impact and economical production due to temperature increase generated during the abrasion resistance improved surface treating process. CONSTITUTION: The ion implantation equipment comprises an ion generator, a particle accelerator, a vacuum chamber(3) and an ion implantation chamber(4), wherein overheating of products mounted to disc shaped product holders is prevented by mounting a product holder assembly(5) having 6 or more disc shaped product holders to the ion implantation chamber(4) so that the disc shaped product holders are revolved and rotated, wherein RF ion source(1) or DC ion source, an ion generator generating a maximum current of 1 mA or more, an ion beam having a diameter of 10 cm or more, and an ion beam current density of 20 μA/cm2 or more without heat impact are used in the ion implantation equipment, wherein vacuum of the ion generator, particle accelerator and vacuum chamber is not influenced when detaching the ion implantation completed product and mounting a new product by installing a gate valve(13) between the vacuum chamber and the ion implantation chamber, wherein a life cycle of the cemented carbide tool is increased to 1.5 times by infiltrating nitrogen ions accelerated to 50 to 100 keV into the surface of cemented carbide tools(6) for printing circuit boards, namely, microdrill and router in a density of 1 to 5x10¬17 ions/cm2, and wherein the outer axis has the disc shaped product holders revolved while the inner axis has the disc shaped product holders rotated by mounting a product holder assembly having a double axis driven by a DC motor.