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发明名称
摘要
申请公布号
JP3220958(B2)
申请公布日期
2001.10.22
申请号
JP19930117947
申请日期
1993.04.21
申请人
发明人
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
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