| 摘要 |
PURPOSE: A data failure storage compression of semiconductor testing system are provided to capable of storing a test result in a small-capacity data fail memory by using a compression technique. CONSTITUTION: A semiconductor test system is formed with a pattern memory(14) storing the pattern data for generating a test pattern for a DUT(Device Under Test) test, a DUT output signal evaluating portion comparing an output signal with an expected signal and generating fail data when a non-coincidence occurs, a data fail memory(16) storing the fail data due to the noncoincidence, and a compressing portion compressing the fail data. The compressing portion stores the fail data at a predetermined compression ratio by allocating a plurality of addresses of the pattern memory(14) to the single address of the data fail memory(16) in the execution of the first test and executes the second test without compression on only the group having a plurality of addresses of the pattern memory(14) corresponding to the fail data stored in the data fail memory(16).
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