| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate storing container and a substrate storing method wherein electronic substrates can be stored without depositing on them outgassing components generated from the inner wall of the substrate storing container and without exposing them to the external atmosphere. SOLUTION: The substrate storing container has a hermetic container comprising a main- body storage portion 1 for storing therein wafers W and a cover 3 for closing a carriage opening 1a of the main-body storage portion 1, and has an exhausting means 5 communicating with the main-body storage portion 1 of the hermetic container which exhausts a gas generated in the hermetic container. The exhausting means 5 has a housing connected with the main-body storage portion 1 via a communicating tube 7. In the housing of the exhausting means 5, an impeller is provided in the state wherein the ends of its rotational blades are passed closely to a connectively communicating portion between the communicating tube 7 and the housing of the exhausting means 5. Further, in the housing of the exhausting means 5, there are provided a sucking port for taking therein a gas flow for rotating therewith the impeller and an exhausting port whose relative position to the sucking port is made farther than the relative position of the connectively communicating portion to the sucking port. In this way, the wafers W are stored hermetically in the main-body storage portion 1, while exhausting continuously the gas in the portion 1 by rotating the impeller with the gas flow of an atmosphere wherein the substrate storing container is disposed.</p> |
