METHOD FOR MEASURING ABERRATION IN OPTICAL IMAGE FORMING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an improved method and a device for detecting aberrations in an optical projection system. SOLUTION: This method includes a step for measuring one or more parameters, such as the best focus position and (or) a lateral direction position of an image formed by an image-forming system. The measurement is repeated relative to plural various radiation settings of the image forming system, and one or more coefficients showing the aberration of the image forming system is calculated from the measurement.