发明名称 SEMICONDUCTOR DEVICE TESTING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device testing apparatus changing no state of a signal imparted to a semiconductor device to be tested even if the test condition is changed when performing a test 2 immediately after a test 1. SOLUTION: This semiconductor device testing apparatus is provided with plural signal impressing circuits composed of a waveform shaper and a driver for impressing a signal waveform generated by this waveform shaper on the testing object semiconductor device, and is constituted such that these plural signal impressing circuits are provided with gates for operating one of clock signals impressed on the testing object semiconductor device as an impressing circuit of a positive phase clock, operating the other as an impressing circuit of an antiphase clock, impressing the positive phase clock and the antiphase clock to a pair of clock input pins arranged in the testing object semiconductor device and taking out a continuous clock outputted from a continuous oscillator by reversing polarity to obtain the antiphase clock of the clock outputted from the continuous oscillator by selecting outputs of these gates.
申请公布号 JP2001289911(A) 申请公布日期 2001.10.19
申请号 JP20000102462 申请日期 2000.04.04
申请人 ADVANTEST CORP 发明人 YOSHIBA KAZUMICHI
分类号 G01R31/28;(IPC1-7):G01R31/28 主分类号 G01R31/28
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