TWO-DIMENSIONAL X RAY SENSOR AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a two-dimensional X ray sensor capable of homogeneously forming an X ray photoelectric converting part requiring a formation temperature beyond the heat resistant temperature of a TFT, and a method for manufacturing the two-dimensional X ray sensor. SOLUTION: An X ray photoelectric converting part is formed between a substrate and a TFT so that an X ray charge converting part can be formed in a formation temperature beyond the heat resistant temperature of the TFT on a flat and homogeneous face.