| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibrating angular sensor with small size and light weight by reducing the density of a flexure part to lower the height of the flexure part. SOLUTION: In the ring vibrating angular velocity sensor, the thin wall cylinder of a vibrator 8 or an exciting part 0 consisting of a thin wall circular ring is excited by the standing wave of a vibration mode 1 in a diametric direction, and an output vibrating component with a different phase of 90 deg. from the standing wave is detected, which is produced from Coriolis force by applying an input angular velocity of a detecting object; a cylindrical flexure part 83 with the same material of the part 80 and a wall thinner than the part 80 is integrally formed between the part 80 and a seat 82; and meshes are regularly holed and formed on a cylindrical flexure part 9. |
