| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection device, capable of simply, speedily and automatically setting the device status to the most suitable status and enhancing reliability of an inspection result, even if an inspector does not know the pitch of a repetitive pattern formed on a substrate (object to be inspected). SOLUTION: This surface inspection device is provided with a means of illumination 13 for illuminating an object to be inspected 11, a means of image pickup 26 for image pick up of an object, based on diffracted light from the object to be inspected 11, a means of status control 16 for setting or changing device status, when picking up the image of the object by the means of image pickup 26, a means of determination 17 to take in the image of the object picked up by the means of image pickup 26, when changing the device status by the means of status control 16 and for determining the most suitable status of the device status based on the frequency distribution of the pixels of the image, and a means of detection 18 for capturing the image of the object picked up by the means of image pickup 26, when setting the most suitable status by the means of status control 16 and to detect the defects of the object to be inspected 11 based on the image. |
