| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement sensor which makes it possible to easily confirm data used in a stage from image acquisition to displacement quantity calculation. SOLUTION: This displacement sensor automatically extracts measurement point coordinates from an image obtained by an image pickup element by using specific measurement algorithm, and calculates a target displacement quantity from the automatically extracted measurement point coordinates. This sensor has a display data editing means which edits the data used in the stage from the image acquisition to the displacement calculation into display data for an image monitor. |
