IMPEDANCE ADJUSTMENT METHOD FOR MATCHING CIRCUIT AND ITS DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an impedance adjustment method for a matching circuit that can adjust the impedance of a capacitor in a short time with ensured high accuracy, and to provide its device. SOLUTION: A cut-off amount to adjust the impedance of the matching circuit to an object value is obtained through simulation or a comparison arithmetic operation with information in a database of an impedance measured value based on the relation between a partial cut-off amount of a pattern line 22 and the impedance of the matching circuit 2, and the pattern line is partially cut off based on the obtained cut-off amount to adjust the impedance to the object value.