发明名称 STRUCTURE OF MAGNETORESISTANCE(MR) ELEMENT AND ITS MANUFACTURING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To manufacture an element largely exhibiting tunnel magnetoresistance(TMR) effect by precisely controlling thickness, width and length of a cluster layer and properly selecting material. SOLUTION: A magnetoresistance element constituted of a ferromagnetic electrode (A component), a forced layer (F component) or a sensitized layer (D component) and the cluster layer (K component) is formed on an upper surface of an insulating substrate (B component) which is formed of nonmagnetic material by combining MBE method, lithography method, ion etching method, strong external magnetic field and heat treatment. As a result, a magnetoresistance element, whose magnetoresistance(MR) is largely decreased by applying a small external magnetic field is manufactured.</p>
申请公布号 JP2001291914(A) 申请公布日期 2001.10.19
申请号 JP20000109078 申请日期 2000.04.11
申请人 KAWABATA TAKESHI 发明人 KAWABATA TAKESHI
分类号 G01R33/09;G01R15/20;G11B5/39;H01F10/14;H01F10/16;H01F10/32;H01F41/18;H01F41/30;H01L43/08;H01L43/12;(IPC1-7):H01L43/08 主分类号 G01R33/09
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