发明名称 MANUFACTURING METHOD AND MANUFACTURING DEVICE OF ORGANIC EL ELEMENT
摘要 PROBLEM TO BE SOLVED: To achieve an improvement in production efficiency by discovering faults which occurred in a manufacturing process early and reducing a process loss after the vapor deposition of organic layer and electrode. SOLUTION: After having passed through vapor deposition processes (c) to (f) to vapor-deposit the organic layer and electrode, a test process (g) to perform a predetermined test to the vapor-deposited organic layer and electrode is equipped, and a sealing process (h) is performed after the test process.
申请公布号 JP2001291585(A) 申请公布日期 2001.10.19
申请号 JP20000106150 申请日期 2000.04.07
申请人 TOHOKU PIONEER CORP 发明人 ABIKO HIROSHI
分类号 H05B33/10;H01L51/50;H05B33/12;H05B33/14;(IPC1-7):H05B33/10 主分类号 H05B33/10
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