| 摘要 |
PROBLEM TO BE SOLVED: To provide a multichip probe card of a structure that a local crowding of probes is avoided, the repair of the probe card and the maintenance of the probe card are easy and the reliability of the probe card is high, and to provide a chip region sorting method using the probe card. SOLUTION: A circuit base material 11 constituting a probe card is mounted on a probe linking to a test head, for example, not being indicated in the diagram. In the base material 11, chip regions CHIP being opposed to each other of a wafer are shown by broken lines. Apertures 12 provided in the base material 11 are provided in the state corresponding to the chip regions across the regions adjoining each other out of the chip regions CHIP. In short, a plurality of the apertures 12 are provided surely separatedly from each other as much as the component of one piece of the chip region. A plurality of probes 13 are respectively extended from the peripheral edge of each aperture 12 to the positions corresponding to pads on the chip regions CHIP. Moreover, in the base material 11, reference potential conductors 14 are respectively provided in such a way as to encircle the apertures 12.
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