| 摘要 |
PROBLEM TO BE SOLVED: To improve a thermal physical vapor deposition source for an organic electroluminescent material. SOLUTION: This source includes, a) a predetermined housing, b) the housing is further demarcated by a prescribed upper plate, c) a prescribed baffle member is included, d) a prescribed linear projection demarcates a position on a sidewall where the distance between the upper plate has a size L, e) the size ratio wh to ws is within the range of 1.5 to 6.0, and the size ratio L to ws is within the range of 2 to 6, and the size ratio m to L is within the range of 0.15 to 0.40. Further, f) by applying electric potential differences to respective parts of the housing, evaporated electroluminescent material is bounced at the top faces of plural sidewall, upper plates and baffle members of the housing to reach the substrate by passing through a slit. On the other hand, this includes a means by which the passage of electroluminescent material particles through the slit is prevented by the baffle member.
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