Semiconductor device and fabrication method has three-trough structure with imperfections having their distribution of concentration determined in downward direction according to required function

摘要

A semiconductor device has a three-trough structure. The three troughs (31,35,43) and the other troughs (34,42) contain imperfections. The distribution of concentration for these imperfections is determined in a downward direction according to a required function. This means that required functions like the suppression of a leakage current can be achieved even in a miniaturized structure.