发明名称 METHOD FOR TREATING EXHAUST GAS CONTAINING FLUORINE-CONTAINING COMPOUND
摘要 A method for treating an exhaust gas containing a fluorine-containing compound with a catalyst after the removal of solids from the gas, characterized in that the catalyst is a gamma -alumina having a crystal structure such that, in diffraction angles 2 theta obtained by the measurement with a X-ray diffractometer, diffraction lines having an intensity of 100 or more appear at five angles of 33 DEG +/- 1 DEG , 37 DEG +/- 1 DEG , 40 DEG +/- 1 DEG , 46 DEG +/- 1 DEG , 67 DEG +/- 1 DEG ; a preferable method, characterized in that one or more of H2, O2 and H2O are added to the above exhaust gas as a gas for aiding the decomposition of the fluorine-containing compound; and an apparatus for practicing the method. The method allows the treatment of a perfluorocompound (PFC) with good efficiency and over a long period of time.
申请公布号 WO0176725(A1) 申请公布日期 2001.10.18
申请号 WO2001JP03117 申请日期 2001.04.11
申请人 EBARA CORPORATION;MORI, YOICHI 发明人 MORI, YOICHI
分类号 B01D53/68;B01D53/77;B01D53/86;B01J21/04;H01L21/205;H01L21/302;(IPC1-7):B01D53/86 主分类号 B01D53/68
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